Aalborg XFM Digital Bedienungsanleitung

Technical Data Sheet No. TD0701M Rev. C Date of Issue: September 2009OPERATING MANUALXFM DIGITAL MASSFLOW METERS

74. SPECIFICATIONSFLOW MEDIUM: Please note that XFM Mass Flow Meters are designed to work only withclean gases. Never try to measure flow rates of liq

CAUTION: Aalborg makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting wit

9*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 FF (21.1 FC) at 1 atm]. For other gases use the K factor as a multiplier from APPENDI

10TABLE IV PRESSURE DROPSTABLE V APPROXIMATE WEIGHTSMODELFLOW RATE[std liters/min]MAXIMUM PRESSURE DROP[mm H2O] [psid] [kPa]XFM 17 up to 10 130 0.18 1

115. OPERATING INSTRUCTIONS5.1 Preparation and Warm UpIt is assumed that the Mass Flow Meter has been correctly installed and thor-oughly leak tested

12During initial powering of the XFM transducer, the flow output signal will be indi-cating a higher than usual output. This is an indication that the

135.3 XFM Parameters Settings5.3.1 Engineering Units SettingsThe XFM Mass Flow Meter is capable of displaying flow rate with 23 differentEngineering

5.3.2 Gas Table Settings.The XFM Mass Flow Meter is capable of storing calibration data for up to 10 dif-ferent gases. Digital interface commands are

Mode Enable/Disable - Allows the user to Enable/Disable Flow Alarm.Low Alarm - The value of the monitored Flow in % F.S. below which is considered an

The current Flow Alarm settings and status are available via digital interface (seeparagraph 8.3 ASCII Command Set “XFM SOFTWARE INTERFACE COM-MANDS”)

TABLE OF CONTENTS1. UNPACKING THE XFM MASS FLOW METER...1.1 Inspect Package for External Damage...

175.3.6 K Factors SettingsConversion factors relative to Nitrogen for up to 36 gases are stored in the XFM(see APPENDIX II). In addition, provision i

18Figure b-6: XFM Screen in the beginning of Auto Zero procedure.The Auto Zero procedure normally takes 1 - 2 minutes during which time the DPZero cou

195.3.8 Self Diagnostic AlarmXFM series Mass Flow Meters are equipped with a self-diagnostic alarm whichis available via multicolor LED, digital inte

20Analog output signals of 0-5 Vdc and 4-20 mA are attained at the appropriate pinsof the 15-pin "D" connector (see Figure b-1) on the side

216.2 Flow Path CleaningBefore attempting any disassembly of the unit for cleaning, try inspecting the flowpaths by looking into the inlet and outlet

22The 60 micron filter screen will now become visible. Remove the screen. DO NOTremove the RFE inside the flow transducer. Clean or replace each of th

23Generally, calibrations are performed using dry nitrogen gas. The calibration canthen be corrected to the appropriate gas desired based on relative

247.2.2 ZERO Check/AdjustmentUsing Aalborg® supplied calibration and maintenance software open Back Dooraccess:Query/BackDoor/OpenWhen software prompt

25Sensor readings are entered in counts of 12 bits ADC output and should alwaysbe in the range of 0 to 4095. There are 11 elements in the table so the

267.3 Analog output Calibration of XFM Mass Flow MetersXFM series Mass Flow Meters are equipped with cali-brated 0-5 Vdc and 4-20 mA output signals.

7. CALIBRATION PROCEDURES...7.1 Flow Calibration...

277.3.1 Initial SetupPower up the Mass Flow Meter for at least 15 minutes prior to commencing thecalibration procedure. Make sure absolutely no flow t

287. Save AoutScale_mA in to the EEPROM: !11,MW,27,Y[CR]Save AoutOffset_mA in to the EEPROM: !11,MW,28,Z[CR]Where: Y – the calculated AoutScale_mA

29Several examples of commands follow. All assume that the XFM has been con-figured for address 18 (12 hex) on the RS485 bus:1. To get current calib

308.3 ASCII Commands SetAALBORG XFM SOFTWARE INTERFACE COMMANDSCOMMANDNAMEDESCRIPTIONNo.COMMAND SYNTAXCommandArgument 1Argument 2 Argument 3 Argument

31COMMANDNAMEDESCRIPTIONNo.COMMAND SYNTAXCommandArgument 1 Argument 2 Argument 3Argument 4 ResponseAuto ZeroStarts /reads the status of the auto zero

32COMMANDNAMEDESCRIPTIONNo.COMMAND SYNTAXCommand Argument 1Argument 2Argument 3 Argument 4 ResponseRelay ActionAssigns action of the two SPDT relays.

33COMMANDNAMEDESCRIPTIONNo.COMMAND SYNTAXCommand Argument 1Argument 2Argument 3 Argument 4ResponseK FactorsApplies a gas correction factor to the curr

34COMMANDNAMEDESCRIPTIONNo.COMMAND SYNTAXCommandArgument 1Argument 2 Argument 3 Argument 4 ResponseUnitsSet the units of measure for gas flow and tota

35UART Error Codes:1 - Not Supported Command or Back Door is not enabled.2 - Wrong # of Arguments.3 - Address is Out of Range (MR or MW commands).4 -

9. TROUBLESHOOTING9.1 Common ConditionsYour XFM Digital Mass Flow Meter was thoroughly checked at numerous qualitycontrol points during and after manu

11. UNPACKING THE XFM MASS FLOW METER1.1 Inspect Package for External DamageYour XFM Mass Flow Meter was carefully packed in a sturdy cardboard carton

379.2 Troubleshooting GuideNO. INDICATION LIKELY REASON SOLUTION1 No zero reading after 15 min. warm up time and no flow condition.Embedded temperatur

38NO. INDICATION LIKELY REASON SOLUTION8 Gas flows through the XFM, but LCD Display reading and the output voltage 0-5 Vdc signal do not respond to fl

9.3 Technical AssistanceAalborg® Instruments will provide technical assistance over the phone to quali-fied repair personnel. Please call our Technica

40APPENDIX IAALBORG7 XFM EEPROM Variables Rev.A0 [12/19/2006] Gas Independent VariablesINDEX NAME DATA TYPE NOTES0BlankEEPROM char[10] Do not modify.

41INDEX NAME DATA TYPE NOTES35Klag [5] float DRC Lag Constant [Do Not Alter]36Kgain[0] float Gain for DRC Lag Constant [Do Not Alter]37Kgain[1] float

42Calibration Table: Gas Dependent Variables.Note: Values will be available for selected gas only.INDEX NAME DATA TYPE NOTES100GasIdentifer char[20] N

43APPENDIX II INTERNAL "K" FACTORSCAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that

44APPENDIX III GAS FACTOR TABLE (“K FACTORS”)CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications tha

45ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Deuterium D21.00 1.722 1.799Diborane B2H6.4357 .508 1.235Dibromodifluoromethane CBr2F2.1947 .15

46ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Hydrogen Bromide HBr1.000 .0861 3.610Hydrogen Chloride HCl1.000 .1912 1.627Hydrogen Cyanide HCN

2CAUTION: XFM TRANSDUCERS SHOULD NOT BE USED FOR MONITORING OXYGEN GAS UNLESS SPECIFICALLY CLEANED AND PREPARED FOR SUCH APPLICATION. For more inform

47ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Phosphorous Oxychloride POCl3.36 .1324 6.843Phosphorous Pentafluoride PH5.3021 .1610 5.620Phosp

48APPENDIX IV COMPONENT DIAGRAMTOP COMPONENT SIDEAug. 09, 2007

49BOTTOM COMPONENT SIDEAug 09, 2007

APPENDIX VDIMENSIONAL DRAWINGSXFM WITHOUT READOUT50

XFM WITH PROFIBUS CAPABILITY51

XFM WITH READOUT OPTION52

APPENDIX VI53NOTE: Follow Return Procedures In Section 1.3.WARRANTYAalborg7 Mass Flow Systems are warranted against parts and workmanship for a period

32.2 Electrical ConnectionsXFM is supplied with a 15 pin "D" connector. Pin diagram is presented in Figure b-1.2.2.1 Power Supply Connectio

2.2.3 Communication Parameters and ConnectionsThe digital interface operates via RS485 (optional RS-232 or Profibus DP avail-able) and provides acces

5Figure b-1 - XFM 15 PIN "D" CONNECTOR CONFIGURATIONIMPORTANT NOTES:Generally, "D" Connector numbering patterns are standardized.

3. PRINCIPLE OF OPERATIONThe stream of gas entering the Mass Flow transducer is split by shunting a smallportion of the flow through a capillary stain