Aalborg AFC Bedienungsanleitung

OPERATING MANUALAFM and AFC MASS FLOW METERS and CONTROLLERSTechnical Data Sheet No. TD9305M Rev. MDate of Issue: August 2009

OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mAoptional (50-500 Ω loop resistance); 20 mV peak to peak max noise.Contact your

FLOW RANGESTABLE I AFM 26 AND AFC 26 LOW FLOW MASS FLOW METER/CONTROLLERS*TABLE II AFM 36 AND AFC 36 MEDIUM FLOW MASS FLOW METER/CONTROLLERS*TABLE III

TABLE IV PRESSURE DROPS AFMTABLE IV PRESSURE DROPS AFCTABLE V APPROXIMATE WEIGHTS9MODEL WEIGHT SHIPPING WEIGHTAFM 26 transmitter 1.71 lbs (0.78 kg) 3.

5. OPERATING INSTRUCTIONS5.1 Preparation and Warm UpIt is assumed that the Mass Flow Meter or Controller has been correctly installedand thoroughly le

115.3 Swamping ConditionIf a flow of more than 10% above the maximum flow rate of the Mass Flow Meteris taking place, a condition known as "swamp

It is recommended that a potentiometer between 5K to 100K ohm and capable ofat least 10-turns or more for adjustment be used. Use the control potentio

6. MAINTENANCE6.1 IntroductionIt is important that the Mass Flow Meter/Controller is used with clean, filteredgases only. Liquids may not be metered.

screen will now become visible. Push the screen out through the inlet fitting. Cleanor replace each of the removed parts as necessary. If alcohol is u

remove the plastic cap on top of the valve, and turn the set screw counterclock-wise until it stops. See section 7.4 for valve adjustment, to return t

FIGURE 7-1, CALIBRATION POTENTIOMETER LOCATIONS7.2 Calibration of AFM Mass Flow MetersAll adjustments in this section are made from the outside of the

TABLE OF CONTENTS1. UNPACKING THE AFM/AFC MASS FLOW METER...1.1 Inspect Package for External Damage...

7.2.2 ZERO AdjustmentShut off the flow of gas into the Mass Flow Meter. To ensure that no seepage orleak occurs into the meter, it is good practice to

7.3.2 ZERO AdjustmentShut off the flow of gas into the Mass Flow Meter. To ensure that no seepage orleak occurs into the meter, it is good practice t

the transducer. The unit will now act as a mass flow meter.CAUTION: If the valve is left in the AUTO (control) or OPEN mode for anextended period of t

TABLE VI AFC SOLENOID VALVE ORIFICE SELECTION TABLE8. TROUBLESHOOTING8.1 Common ConditionsYour Mass Flow Meter/Controller was thoroughly checked at nu

8.2 Troubleshooting Guide21REMEDYcheck connection of power supplydisconnect AFM/AFC transducer frompower supply; remove the shortingcondition or check

22REMEDYlocate and correctreturn to factory for replacementreturn to factory for replacementlocate and repairuse matched calibrationsee K factor table

For best results it is recommended that instruments are returned to the factoryfor servicing. See section 1.3 for return procedures.8.3 Technical Assi

APPENDIX 1COMPONENTS DIAGRAMS24AFM METERING PC BOARD(ALSO INCORPORATED IN AFC)AFC CONTROL PC BOARD

25APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that

26ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Deuterium D21.00 1.722 1.799Diborane B2H6.4357 .508 1.235Dibromodifluoromethane CBr2F2.1947 .15

7.3 Linearity Adjustment...7.3.1 Connections and Initial Warm Up...

27ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Hydrogen Bromide HBr1.000 .0861 3.610Hydrogen Chloride HCl1.000 .1912 1.627Hydrogen Cyanide HCN

28ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Phosphorous Oxychloride POCl3.36 .1324 6.843Phosphorous Pentafluoride PH5.3021 .1610 5.620Phosp

APPENDIX 3DIMENSIONAL DRAWINGSAFM 26 MASS FLOW METERNOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any

AFM 36/46 MASS FLOW METERNOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For ce

AFC 26 MASS FLOW CONTROLLERNOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For

AFC 36/46 MASS FLOW CONTROLLERNOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. F

NOTE: Follow Return Procedures In section 1.3.33APPENDIX 4WARRANTYAalborg7 Mass Flow Systems are warranted against parts and workmanshipfor a period

11. UNPACKING THE AFM/AFC MASS FLOW METER1.1 Inspect Package for External DamageYour AFM/AFC Mass Flow Meter/Controller was carefully packed in a st

22. INSTALLATION2.1 Primary Gas ConnectionsPlease note that the AFM/AFC Mass Flow Meter/Controller will not operate withliquids. Only clean gases are

FIGURE 2-1, WIRING DIAGRAM FOR AFM/AFC TRANSDUCERSFIGURE 2-3, AFM/AFC 15 PIN "D" CONNECTOR CONFIGURATION3PIN FUNCTION1Chassis Ground2 Common

Important Notes:In general, "D" Connector numbering patterns are standardized. There are, how-ever, some connectors with nonconforming patte

4. SPECIFICATIONSFLOW MEDIUM: Please note that AFM26/36/46 Mass Flow Meters and AFC26/36/46Mass Flow Controllers are designed to work with clean gases

WETTED MATERIALS: 316 stainless steel, VITON7 O-rings; BUNA-N7, EPR or KALREZ7O-rings are optional.Aalborg7 makes no expressed or implied guarantees